Profile error compensation in ultra-precision grinding of ...
The grinding of aspheric moulds was performed on a 4-axis ultra-precision machine tool (NACHI, ASP005P), as shown in Fig. 1(a). The work spindle of this machine can linearly move along Z-axis at a positioning resolution of 1 nm and Y-axis at a resolution 100 nm.The grinding spindle is installed on a rotary table (B-axis).Its rotational movement has a resolution of 0.0001°.
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